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Home > Technology > Material Science > Spectroscopic Ellipsometry: Principles and Applications-eBook

Spectroscopic Ellipsometry: Principles and Applications

Fukiwara, Hiroyuki

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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

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Title of ebook: Spectroscopic Ellipsometry: Principles and Applications
ISBN: 9780470060186
Publisher: John Wiley & Sons, Ltd.
Internet download file size: 15744 kb
Pages: 388
Released online for download: 09-27-2007
Author of eBook: Fukiwara, Hiroyuki

Spectroscopic Ellipsometry

Principles and Applications

Chapter One

Introduction to Spectroscopic Ellipsometry

Because of recent advances in computer technology, the spectroscopic ellipsometry technique has developed rapidly. As a result, the application area of spectroscopic ellipsometry has also expanded drastically. In spectroscopic ellipsometry, process diagnosis including thin-film growth can be performed in real time by employing light as a measurement probe. More recently, 'feedback control,' in which complicated device structure is controlled in real time, has been carried out using spectroscopic ellipsometry. In this chapter, we review the features and applications of spectroscopic ellipsometry. This chapter will provide an overview of measurement techniques and data analysis procedures in spectroscopic ellipsometry.

1.1 FEATURES OF SPECTROSCOPIC ELLIPSOMETRY< ... read full excerpt from Spectroscopic Ellipsometry: Principles and Applications ebook