Spectroscopic Ellipsometry: Principles and Applications

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Share your thoughts on the Spectroscopic Ellipsometry: Principles and Applications ebook with other internet viewers!

Title of ebook: Spectroscopic Ellipsometry: Principles and Applications
ISBN: 9780470060186
parent-ISBN: 9780470016084
Publisher: John Wiley & Sons, Ltd.
Internet download file size: 15744 kb
Pages: 388
Published: 09-2007
Released online for download: 09-27-2007
Author of eBook: Fukiwara, Hiroyuki

Format

Encrypted

Sku

ISBN

File size

Security

Printing

Copying

Read aloud

Devices

Digital Editions

Yes

0470060182

9780470060186

15744 KB

n/a

Not allowed

15 selections to your clipboard every 365 days

No

Sys Requirments

Download reader

Spectroscopic Ellipsometry

Principles and Applications

Chapter One

Introduction to Spectroscopic Ellipsometry

Because of recent advances in computer technology, the spectroscopic ellipsometry technique has developed rapidly. As a result, the application area of spectroscopic ellipsometry has also expanded drastically. In spectroscopic ellipsometry, process diagnosis including thin-film growth can be performed in real time by employing light as a measurement probe. More recently, 'feedback control,' in which complicated device structure is controlled in real time, has been carried out using spectroscopic ellipsometry. In this chapter, we review the features and applications of spectroscopic ellipsometry. This chapter will provide an overview of measurement techniques and data analysis procedures in spectroscopic ellipsometry.

1.1 FEATURES OF SPECTROSCOPIC ELLIPSOMETRY

Ellipsometry is an optical measurement technique that characterizes light reflection (or transmission) from samples. The key feature of ellipsometry is that it measures the change in p ... read full excerpt from Spectroscopic Ellipsometry: Principles and Applications ebook

Other Technology eBooks Categories

Technology General (3002)

Industrial Design (36)

Aeronautics & Astronautics (41)

Agriculture (450)

Construction (138)

Electronics (456)

Engineering (1644)

Environmental Engineering & Technology (73)

Food Science (92)

Imaging Systems (32)

Industrial Health & Safety (35)

Material Science (86)

Military Science (77)

Quality Control (46)

Radio (66)

Social Aspects (29)

Telecommunications (736)

Television & Video (64)

Transportation (616)

Top eBooks in Material Science

Biomaterials Science: An Introduction to Materials in Medicine
by Ratner, Buddy D.

The second edition of this bestselling title provides the most up-to-date comprehensive review of all aspects of biomaterials science by providing a balanced, ...more

Best price: $108.00

Advanced Strength and Applied Elasticity
by Ugural, Ansel C., Fenster, Saul K.

This is the eBook version of the printed book. If the print book includes a CD-ROM, this content is not included within the eBook version.This ...more

Best price: $58.35

Corrosion and Corrosion Control
by Revie, R. Winston

The classic book on corrosion science and engineering—now in a valuable new editionThe ability to prevent failures by managing corrosion is one ...more

Best price: $105.00

Advanced Mechanics of Composite Materials
by V. Vasiliev, Valery

Composite materials have been representing most significant breakthroughs in various industrial applications, particularly in aerospace structures, during the ...more

Best price: $257.38

Castings Practice: The Ten Rules of Castings
by Campbell, John

each chapter of Professor Cambell's new book Castings Practice will take a look at one of his 10 rules. It is to be expected that the Rules wil one day be taken...more

Best price: $54.85

Chemical Admixtures for Concrete
by Rixom, Roger

Chemical admisxtures are used in concrete mixtures to produce particular engineering properties such as rapid hardening. "Chemical Admixtures for Concrete" ...more

Best price: $120.80

3D AutoCAD 2008: One Step at a Time

Customer review:
Very useful book with step by step constructions. Very clear and easy to adapt. Great Book...more

Best price: $16.79

Audel TM Pipefitter's and Welder's Pocket Manual, All New 2nd Edtion

Customer review:
New, updated version of the highly respected Audel brand guidebook that has provided practical references for skilled tradespersons and students for more than 100 years The perfect...more

Best price: $13.33

Inviting Disaster

Customer review:
I liked this book a lot, the way the author presents the disasters although informative and detailed enough, doesn't get boring, instead you are hooked by the first page and it is ...more

Best price: $11.37