Microelectronic Applications of Chemical Mechanical Planarization ebook Li, Yuzhuo Diesel eBooks

Fiction eBooks
General Fiction Romance Erotica Fantasy Science Fiction Mystery & Detective Suspense & Thrillers Action & Adventure Children's Fiction Classics & Drama Literary & Poetry Free eBook downloads

Last Viewed

Download Free eBook Readers
Mobipocket Reader Microsoft MS Reader Adobe Reader Palm eReader
To browse or view on: Pocket PC PDA Palm PDA Handspring PDA Wireless Phone Personal PC

Talk To Us

If you notice any site errors or have an idea, we'd love to hear it no matter how small.

Your first time?

We recommend you download one of our test eBooks to make sure you have the right settings on your computer.

Absolutely smooth transaction and download... I can now add your site to my internet favorites because of your extraordinary customer service!

K. Wood
Tacoma, WA

Home > Technology > Engineering > Microelectronic Applications of Chemical Mechanical Planarization-eBook

Microelectronic Applications of Chemical Mechanical Planarization

Li, Yuzhuo

Our price:

Adobe

$148.97

Wishlist

receive alert on new titles by this author

An authoritative, systematic, and comprehensive description of current CMP technology

Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization:
*

Provides in-depth coverage of a wide range of state-of-the-art technologies and applications
*

Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips
*

Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP
*

Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP
*

Provides a perspective on the opportunities and challenges of the next fifteen years

Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.

Microelectronic Applications of Chemical Mechanical Planarization ebook adobe icon

Adobe Settings

Read Aloud:	Yes
Copying:	Not allowed
Printing:	Not allowed

Title of ebook: Microelectronic Applications of Chemical Mechanical Planarization
ISBN: 9780470180891
Publisher: Wiley-Interscience
Internet download file size: 25471 kb
Pages: 734
Released online for download: 10-16-2007
Author of eBook: Li, Yuzhuo