RF MEMS and Their Applications
Chapter One
Microelectromechanical systems
(MEMS) and radio frequency
MEMS
1.1 INTRODUCTION
During the past decade, several new fabrication techniques have evolved which helped
popularize microelectromechanical systems (MEMS), and numerous novel devices have
been reported in diverse areas of engineering and science. One such area is microwave
and millimeter wave systems. MEMS technology for microwave applications should solve
many intriguing problems of high-frequency technology for wireless communications. The
recent and dramatic developments of personal communication devices forced the market
to acquire miniaturized efficient devices, which is possible only by the development of
radio frequency (RF) MEMS.
The term RF MEMS refers to the design and fabrication of MEMS for RF integrated
circuits. It should not be interpreted as the traditional MEMS devices operating at RF frequencies.
MEMS devices in RF MEMS are used for actuation or adjustment of a separate
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