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Fundamentals of Semiconductor Manufacturing and Process Control
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"Fundamentals of Semiconductor Manufacturing and Process Control examines in detail the methodology by which electronic materials and supplies are converted into finished integrated circuits, and electronic products in a high-volume manufacturing environment. Topics covered include: manufacturing and technology overviews, process monitoring, statistical fundamentals, yield modeling, statistical process control, statistical experimental design, process modeling, advanced process control, process and equipment diagnosis, and CIM/CAM systems. "
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Title of
ebook: Fundamentals of Semiconductor Manufacturing and Process Control
ISBN: 9780471790273
Publisher:
Wiley-IEEE Press
Internet download file size: 6902 kb
Pages: 463
Released online for download: 05-11-2006
Author of eBook: May, Gary S. Author of eBook: Spanos, Costas J.
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